PDR900中文資料MKS數(shù)據(jù)手冊PDF規(guī)格書

Product Features

? Increased pressure measurement range from 10-5 Torr to

atmosphere, two decades beyond a standard Pirani

? Three set point relays for process control (option)

? Ultra compact design

? High accuracy for improved process control

? Ease of operation via analog output and digital

communication (RS232, RS485, and EtherCAT)

? MicroPirani solid state sensor is resistant to damage from air

inrush or vibration

? Mountable in any orientation for ease of installation; no loss

of measurement accuracy

? Optional integrated touch-screen display available for local

pressure indication, etc.

? Alternate analog output and electrical connectors available to

match other vendors’ gauges and facilitate an easy upgrade